G.A.Kachurin1, S.G.Cherkova1,2, V.A.Volodin1,2, A.G.Cherkov1,2, D.V.Marin1,2,
G.N.Kamaev1,2, A.H.Antonenko1,2, V.A.Skuratov3
Light-rediating nanostructures
formation by fast heavy ions implantation into alternating
Si/SiO2nanolayers
1A.V.Rzhanov Institute of Semiconductor Physics, SB RAS, Novosibirsk
2Novosibirsk State University, Novosibirsk
3United Institute of Nuclear Research, Dubna |