O.A.Podsvirov1, P.A.Karasev1, A.Ya.Vinogradov2, V.S.Belyakov1,
A.V.Arkhipov1, K.V.Karabeshkin1, N.N.Karasev3, E.N.Shubina1, �.�.�����1
Effect of ion bombardment for
α-C:H film properties
1St.-Petersburg State Polytechnical University, St.-Petersburg
2A.F.Ioffe Physico-Technical Institute, St.-Petersburg
3St.-Petersburg State University of Information Technologies, Mechanics and Optics,
St.-Petersburg
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